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Results: 1
Interlayer mediated epitaxy of cobalt silicide on silicon (100) from low temperature chemical vapor deposition of cobalt - Formation mechanisms and associated properties
Authors: Londergan, AR Nuesca, G Goldberg, C Peterson, G Kaloyeros, AE Arkles, B Sullivan, JJ
Citation: Ar. Londergan et al., Interlayer mediated epitaxy of cobalt silicide on silicon (100) from low temperature chemical vapor deposition of cobalt - Formation mechanisms and associated properties, J ELCHEM SO, 148(1), 2001, pp. C21-C27
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