Authors:
de Graaf, A
Dinescu, G
Longueville, JL
van de Sanden, MCM
Schram, DC
Dekempeneer, EHA
van Ijzendoorn, LJ
Citation: A. De Graaf et al., Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates, THIN SOL FI, 333(1-2), 1998, pp. 29-34