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Application of the low-loss scanning electron microscope image to integrated circuit technology part 1 - Applications to accurate dimension measurements
Authors: Postek, MT Vladar, AE Wells, OC Lowney, JL
Citation: Mt. Postek et al., Application of the low-loss scanning electron microscope image to integrated circuit technology part 1 - Applications to accurate dimension measurements, SCANNING, 23(5), 2001, pp. 298-304
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