Authors: MACAK K NYBERG T MACAK P OLSSON MK HELMERSSON U BERG S

Citation: K. Macak et al., MODELING OF THE DEPOSITION OF STOICHIOMETRIC AL2O3 USING NONARCING DIRECT-CURRENT MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1286-1292