Authors:
MACAK K
NYBERG T
MACAK P
OLSSON MK
HELMERSSON U
BERG S
Citation: K. Macak et al., MODELING OF THE DEPOSITION OF STOICHIOMETRIC AL2O3 USING NONARCING DIRECT-CURRENT MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1286-1292