Citation: Fj. Clough et al., LOW-TEMPERATURE (LESS-THAN-OR-EQUAL-TO-600-DEGREES-C) SEMIINSULATING OXYGEN-DOPED SILICON FILMS BY THE PECVD TECHNIQUE FOR LARGE-AREA POWERAPPLICATIONS, Microelectronic engineering, 28(1-4), 1995, pp. 451-454
Citation: Fj. Clough et al., LOW-TEMPERATURE (LESS-THAN-OR-EQUAL-TO-600-DEGREES-C) SEMIINSULATING OXYGEN-DOPED SILICON FILMS BY THE PECVD TECHNIQUE FOR LARGE-AREA POWERAPPLICATIONS, Thin solid films, 270(1-2), 1995, pp. 517-521