Citation: Y. Maemura et al., TRANSPORT OF NEGATIVELY CHARGED-PARTICLES BY E-X-B DRIFT IN SILANE PLASMAS, Surface & coatings technology, 98(1-3), 1998, pp. 1351-1358
Authors:
YANG SC
MAEMURA Y
TAZOE K
MATSUDA Y
FUJIYAMA H
Citation: Sc. Yang et al., INFLUENCE OF A MODULATED MAGNETIC-FIELD ON THE BEHAVIOR OF PARTICULATES IN SILANE PLASMA CVD, Surface & coatings technology, 97(1-3), 1997, pp. 366-371