Authors: DELSOL R RAYNAUD P SEGUI Y LATRECHE M AGRES L MAGE L

Citation: R. Delsol et al., GROWTH-PROCESSES OF DIELECTRIC THIN-FILMS IN A MULTIPOLAR MICROWAVE PLASMA EXCITED BY DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE USING TETRAETHYLORTHOSILICATE (TEOS) AND OXYGEN PRECURSORS, Thin solid films, 289(1-2), 1996, pp. 170-176