Authors: GUYOT Y MALHAIRE C LEBERRE M CHAMPAGNON B SIBAI A BUSTARRET E BARBIER D

Citation: Y. Guyot et al., MICRO-RAMAN STUDY OF THERMOELASTIC STRESS-DISTRIBUTION IN OXIDIZED SILICON MEMBRANES AND CORRELATION WITH FINITE-ELEMENT MODELING, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 24-28