Authors: DONNELLY VM MALYSHEV MV KORNBLIT A CIAMPA NA COLONELL JI LEE JTC

Citation: Vm. Donnelly et al., TRACE RARE-GASES OPTICAL-EMISSION SPECTROSCOPY FOR DETERMINATION OF ELECTRON TEMPERATURES AND SPECIES CONCENTRATIONS IN CHLORINE-CONTAININGPLASMAS, JPN J A P 1, 37(4B), 1998, pp. 2388-2393

Authors: VYVODA MA LEE H MALYSHEV MV KLEMENS FP CERULLO M DONNELLY VM GRAVES DB KORNBLIT A LEE JTC

Citation: Ma. Vyvoda et al., EFFECTS OF PLASMA CONDITIONS ON THE SHAPES OF FEATURES ETCHED IN CL-2AND HBR PLASMAS - I - BULK CRYSTALLINE SILICON ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3247-3258

Authors: MALYSHEV MV DONNELLY VM SAMUKAWA S

Citation: Mv. Malyshev et al., ULTRAHIGH FREQUENCY VERSUS INDUCTIVELY-COUPLED CHLORINE PLASMAS - COMPARISONS OF CL AND CL-2 CONCENTRATIONS AND ELECTRON TEMPERATURES MEASURED BY TRACE RARE-GASES OPTICAL-EMISSION SPECTROSCOPY, Journal of applied physics, 84(3), 1998, pp. 1222-1230

Authors: MALYSHEV MV DONNELLY VM KORNBLIT A CIAMPA NA

Citation: Mv. Malyshev et al., PERCENT DISSOCIATION OF CL-2 IN INDUCTIVELY-COUPLED, CHLORINE-CONTAINING PLASMAS, Journal of applied physics, 84(1), 1998, pp. 137-146

Authors: MALYSHEV MV DONNELLY VM

Citation: Mv. Malyshev et Vm. Donnelly, DETERMINATION OF ELECTRON TEMPERATURES IN PLASMAS BY MULTIPLE RARE-GAS OPTICAL-EMISSION, AND IMPLICATIONS FOR ADVANCED ACTINOMETRY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 550-558