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Authors: PETTERSSON PO ZUR A DANIEL ES LEVY HJ MARSH OJ MCGILL TC

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Authors: DANIEL ES JONES JT MARSH OJ MCGILL TC

Citation: Es. Daniel et al., MACROSCOPIC AND MICROSCOPIC STUDIES OF ELECTRICAL-PROPERTIES OF VERY THIN SILICON DIOXIDE SUBJECT TO ELECTRICAL STRESS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1089-1096