Authors:
MATSUZAWA NN
TAKECHI S
OHFUJI T
KUHARA K
MORI S
ENDO M
KAMON K
MORISAWA T
YAMAGUCHI A
SASAGO M
Citation: Nn. Matsuzawa et al., THEORETICAL CALCULATIONS OF SENSITIVITY OF DEPROTECTION REACTIONS FORACRYLIC POLYMERS FOR 193 NM LITHOGRAPHY II - PROTECTION GROUPS CONTAINING AN ADAMANTYL UNIT, JPN J A P 1, 37(10), 1998, pp. 5781-5785
Authors:
MATSUZAWA NN
OHFUJI T
KUHARA K
MORI S
MORISAWA T
ENDO M
SASAGO M
Citation: Nn. Matsuzawa et al., THEORETICAL CALCULATIONS OF SENSITIVITY OF DEPROTECTION REACTIONS FORACRYLIC POLYMERS FOR 193 NM LITHOGRAPHY, Journal of materials chemistry, 8(4), 1998, pp. 853-858
Citation: Nn. Matsuzawa et N. Kishii, THEORETICAL CALCULATIONS OF COEFFICIENTS OF FRICTION BETWEEN WEAKLY INTERACTING SURFACES, The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory, 101(51), 1997, pp. 10045-10052