Authors: ABRAMOV AS VINOGRADOV AY GOLUBEV VG KOSAREV AI MATYUSHKINA MA PATSEKIN AV

Citation: As. Abramov et al., A STUDY OF AMORPHOUS HYDROGENATED SILICON-NITRIDE FILMS PRODUCED IN THE PLASMA OF A HIGH-FREQUENCY DISCHARGE, Semiconductors, 30(11), 1996, pp. 1011-1014