Authors:
OTT AW
KLAUS JW
JOHNSON JM
GEORGE SM
MCCARLEY KC
WAY JD
Citation: Aw. Ott et al., MODIFICATION OF POROUS ALUMINA MEMBRANES USING AL2O3 ATOMIC LAYER CONTROLLED DEPOSITION, Chemistry of materials, 9(3), 1997, pp. 707-714
Authors:
OTT AW
MCCARLEY KC
KLAUS JW
WAY JD
GEORGE SM
Citation: Aw. Ott et al., ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS USING BINARY REACTION SEQUENCE CHEMISTRY, Applied surface science, 107, 1996, pp. 128-136