Authors: OTT AW KLAUS JW JOHNSON JM GEORGE SM MCCARLEY KC WAY JD

Citation: Aw. Ott et al., MODIFICATION OF POROUS ALUMINA MEMBRANES USING AL2O3 ATOMIC LAYER CONTROLLED DEPOSITION, Chemistry of materials, 9(3), 1997, pp. 707-714

Authors: OTT AW MCCARLEY KC KLAUS JW WAY JD GEORGE SM

Citation: Aw. Ott et al., ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS USING BINARY REACTION SEQUENCE CHEMISTRY, Applied surface science, 107, 1996, pp. 128-136