Authors:
WU F
MCLAURIN AW
HENSON KE
MANAGHAN DG
THOMASSON SL
Citation: F. Wu et al., THE EFFECTS OF THE PROCESS PARAMETERS ON THE ELECTRICAL AND MICROSTRUCTURE CHARACTERISTICS OF THE CRSI THIN RESISTOR FILMS - PART I, Thin solid films, 332(1-2), 1998, pp. 418-422