Authors: MCNEVIN SC CERULLO M

Citation: Sc. Mcnevin et M. Cerullo, CONTACT ETCH SCALING WITH CONTACT DIMENSION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1514-1518

Authors: MCNEVIN SC

Citation: Sc. Mcnevin, OSCILLATING CHEMICAL INSTABILITIES IN CONTACT ETCHING DIAGNOSED BY OPTICAL-EMISSION, JPN J A P 1, 36(4B), 1997, pp. 2464-2469

Authors: MCNEVIN SC GUINN KV TAYLOR JA

Citation: Sc. Mcnevin et al., CHEMICAL CHALLENGE OF SUBMICRON OXIDE ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(2), 1997, pp. 214-220

Authors: MCNEVIN SC CERULLO M

Citation: Sc. Mcnevin et M. Cerullo, DIAGNOSING SIO2 CONTACT ETCH SLAP WITH OPTICAL-EMISSION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 659-663

Authors: GUINN K TOKASHIKI K MCNEVIN SC CERULLO N

Citation: K. Guinn et al., OPTICAL-EMISSION DIAGNOSTICS FOR CONTACT ETCHING IN APPLIED MATERIALSCENTURA HDP 5300 ETCHER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1137-1141

Authors: MCNEVIN SC

Citation: Sc. Mcnevin, THE CORRELATION BETWEEN SELECTIVE OXIDE ETCHING AND THERMODYNAMIC PREDICTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 797-800