Authors: MINAMIHABA G IIJIMA T SHIMOOKA Y TAMURA H KAWANOUE T HIRABAYASHI H SAKURAI N OHKAWA J OBARA T EGAWA H IDAKA T KUBOTA T SHIMIZU T KOYAMA M OOSHIMA J SUGURO K

Citation: G. Minamihaba et al., DOUBLE-LEVEL CU INLAID INTERCONNECTS WITH SIMULTANEOUSLY FILLED VIA PLUGS, JPN J A P 1, 35(2B), 1996, pp. 1107-1110

Authors: NAKASAKI Y MINAMIHABA G SUGURO K ITOW H

Citation: Y. Nakasaki et al., INTERFACIAL ENERGY CALCULATION AT INTERCONNECT-METAL BARRIER-METAL INTERFACES FOR GRAIN-ORIENTATION CONTROL/, Journal of applied physics, 77(6), 1995, pp. 2454-2461

Authors: ITOW H NAKASAKI Y MINAMIHABA G SUGURO K OKANO H

Citation: H. Itow et al., SELF-ALIGNED PASSIVATION ON COPPER INTERCONNECTION DURABILITY AGAINSTOXIDIZING AMBIENT ANNEALING, Applied physics letters, 63(7), 1993, pp. 934-936