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Authors:
HARGIS PJ
GREENBERG KE
MILLER PA
GERARDO JB
TORCZYNSKI JR
RILEY ME
HEBNER GA
ROBERTS JR
OLTHOFF JK
WHETSTONE JR
VANBRUNT RJ
SOBOLEWSKI MA
ANDERSON HM
SPLICHAL MP
MOCK JL
BLETZINGER P
GARSCADDEN A
GOTTSCHO RA
SELWYN G
DALVIE M
HEIDENREICH JE
BUTTERBAUGH JW
BRAKE ML
PASSOW ML
PENDER J
LUJAN A
ELTA ME
GRAVES DB
SAWIN HH
KUSHNER MJ
VERDEYEN JT
HORWATH R
TURNER TR
Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154