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Results: 3
DEVICE-QUALITY POLYCRYSTALLINE AND AMORPHOUS-SILICON FILMS BY HOT-WIRE CHEMICAL-VAPOR-DEPOSITION
Authors: SCHROPP REI FEENSTRA KE MOLENBROEK EC MEILING H RATH JK
Citation: Rei. Schropp et al., DEVICE-QUALITY POLYCRYSTALLINE AND AMORPHOUS-SILICON FILMS BY HOT-WIRE CHEMICAL-VAPOR-DEPOSITION, Philosophical magazine. B. Physics of condensed matter. Statistical mechanics, electronic, optical and magnetic, 76(3), 1997, pp. 309-321
MECHANISMS INFLUENCING HOT-WIRE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON
Authors: MOLENBROEK EC MAHAN AH GALLAGHER A
Citation: Ec. Molenbroek et al., MECHANISMS INFLUENCING HOT-WIRE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON, Journal of applied physics, 82(4), 1997, pp. 1909-1917
FILM QUALITY IN RELATION TO DEPOSITION CONDITIONS OF A-SI-H FILMS DEPOSITED BY THE HOT-WIRE METHOD USING HIGHLY DILUTED SILANE
Authors: MOLENBROEK EC MAHAN AH JOHNSON EJ GALLAGHER AC
Citation: Ec. Molenbroek et al., FILM QUALITY IN RELATION TO DEPOSITION CONDITIONS OF A-SI-H FILMS DEPOSITED BY THE HOT-WIRE METHOD USING HIGHLY DILUTED SILANE, Journal of applied physics, 79(9), 1996, pp. 7278-7292
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