Authors: PEDERSEN D WELLER RA WELLER MR MONTEMAYOR VJ BANKS JC KNAPP JA

Citation: D. Pedersen et al., SPUTTERING AND MIGRATION OF TRACE QUANTITIES OF TRANSITION-METAL ATOMS ON SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 117(1-2), 1996, pp. 170-174