Authors:
PEDERSEN D
WELLER RA
WELLER MR
MONTEMAYOR VJ
BANKS JC
KNAPP JA
Citation: D. Pedersen et al., SPUTTERING AND MIGRATION OF TRACE QUANTITIES OF TRANSITION-METAL ATOMS ON SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 117(1-2), 1996, pp. 170-174