Authors:
FRIJLINK PM
COLLET A
BELLAICHE J
IOST M
VERHEIJEN MJ
VANHELLEPUTTE HRJR
MOORS WGJ
VANDELFT FCMJM
Citation: Pm. Frijlink et al., DEVELOPMENT OF A 100-NM GATE POWER HEMT USING 4-LAYER RESIST AND FLEXIBLE E-BEAM EXPOSURE STRATEGIES, Microelectronic engineering, 35(1-4), 1997, pp. 313-316
Citation: Gacm. Spierings et al., STRESSES IN PT PB(ZR,TI)O-3/PT THIN-FILM STACKS FOR INTEGRATED FERROELECTRIC CAPACITORS/, Journal of applied physics, 78(3), 1995, pp. 1926-1933