Citation: C. Gautier et al., COMPARATIVE-STUDY OF MECHANICAL AND STRUCTURAL-PROPERTIES OF CRN FILMS DEPOSITED BY DC MAGNETRON SPUTTERING AND VACUUM-ARC EVAPORATION, Surface & coatings technology, 87-8(1-3), 1996, pp. 254-262
Authors:
ELSTNER F
GAUTIER C
MOUSSAOUI H
PIOT O
MACHET J
Citation: F. Elstner et al., A COMPARATIVE-STUDY OF STRUCTURE AND RESIDUAL-STRESS IN CHROMIUM NITRIDE FILMS DEPOSITED BY VACUUM ARC EVAPORATION, ION PLATING, AND DC MAGNETRON SPUTTERING, Physica status solidi. a, Applied research, 158(2), 1996, pp. 505-521