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Results: 1-2 |
Results: 2
Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry
Authors: Yakshin, AE Louis, E Gorts, PC Maas, ELG Bijkerk, F
Citation: Ae. Yakshin et al., Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry, PHYSICA B, 283(1-3), 2000, pp. 143-148
Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography
Authors: Stuik, R Louis, E Yakshin, AE Gorts, PC Maas, ELG Bijkerk, F Schmitz, D Scholze, F Ulm, G Haidl, M
Citation: R. Stuik et al., Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography, J VAC SCI B, 17(6), 1999, pp. 2998-3002
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