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Citation: Bs. Macgibbon et al., Particulate contamination in tungsten low pressure chemical vapor deposition: An experimental study, J VAC SCI B, 17(2), 1999, pp. 443-447

Authors: MacGibbon, BS Busnaina, AA Fardi, B

Citation: Bs. Macgibbon et al., The effect of thermophoresis on particle deposition in a tungsten low pressure chemical vapor deposition reactor, J ELCHEM SO, 146(8), 1999, pp. 2901-2905