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Results: 1-25 | 26-28 |
Results: 26-28/28
LPCVD and PACVD (Ti,Al)N films: morphology and mechanical properties
Authors: Anderbouhr, S Ghetta, V Blanquet, E Chabrol, C Schuster, F Bernard, C Madar, R
Citation: S. Anderbouhr et al., LPCVD and PACVD (Ti,Al)N films: morphology and mechanical properties, SURF COAT, 115(2-3), 1999, pp. 103-110
TEM studies of the microstructure evolution in plasma treated CVD TiN thinfilms used as diffusion barriers
Authors: Ikeda, S Palleau, J Torres, J Chenevier, B Bourhila, N Madar, R
Citation: S. Ikeda et al., TEM studies of the microstructure evolution in plasma treated CVD TiN thinfilms used as diffusion barriers, SOL ST ELEC, 43(6), 1999, pp. 1063-1068
Film texture evolution in plasma treated TiN thin films
Authors: Ikeda, S Palleau, J Torres, J Chenevier, B Bourhila, N Madar, R
Citation: S. Ikeda et al., Film texture evolution in plasma treated TiN thin films, J APPL PHYS, 86(4), 1999, pp. 2300-2306
Risultati: 1-25 | 26-28 |