Authors:
Okuji, S
Sakudo, N
Hayashi, K
Okada, M
Onogawa, T
Maesaka, T
Nishiyama, Y
Komatsu, K
Toyoda, K
Yashima, S
Ishida, T
Awazu, K
Citation: S. Okuji et al., Spatial distributions of ion-species in a large-volume inductively coupledplasma source, SURF COAT, 136(1-3), 2001, pp. 102-105