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In situ phase-modulated ellipsometry study of the surface damaging processof silicon under atomic hydrogen
Authors:
Morell, G Vargas, IM Manso, JY Guzman, JR Weiner, BR
Citation:
G. Morell et al., In situ phase-modulated ellipsometry study of the surface damaging processof silicon under atomic hydrogen, SOL ST COMM, 116(4), 2000, pp. 217-220
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