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Results:
1-25
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26-29
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Results: 26-29/29
Microfabricated shear stress sensors, Part 2: Testing and calibration
Authors:
Hyman, D Pan, T Reshotko, E Mehregany, M
Citation:
D. Hyman et al., Microfabricated shear stress sensors, Part 2: Testing and calibration, AIAA J, 37(1), 1999, pp. 73-78
Introduction to MEMS
Authors:
Mehregany, M Roy, S
Citation:
M. Mehregany et S. Roy, Introduction to MEMS, MICROENGINEERING AEROSPACE SYSTEMS, 1999, pp. 1-28
MEMS for harsh application environments
Authors:
Mehregany, M Zorman, CA
Citation:
M. Mehregany et Ca. Zorman, MEMS for harsh application environments, MICROENGINEERING AEROSPACE SYSTEMS, 1999, pp. 119-144
High temperature ohmic contacts to 3C-silicon carbide films
Authors:
Jacob, C Pirouz, P Kuo, HI Mehregany, M
Citation:
C. Jacob et al., High temperature ohmic contacts to 3C-silicon carbide films, SOL ST ELEC, 42(12), 1998, pp. 2329-2334
Risultati:
1-25
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26-29
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