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Authors: Meinschien, J Behme, G Falk, F Stafast, H

Citation: J. Meinschien et al., Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices, APPL PHYS A, 69, 1999, pp. S683-S686

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Authors: Meinschien, J Falk, F Hobert, H Stafast, H

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