Authors: Gao, Y He, S Alluri, P Engelhard, M Lea, AS Finder, J Melnick, B Hance, RL

Citation: Y. Gao et al., Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganicchemical vapor deposition, J APPL PHYS, 87(1), 2000, pp. 124-132