Authors: Melvas, P Kalvesten, E Stemme, G

Citation: P. Melvas et al., A surface-micromachined resonant-beam pressure-sensing structure, J MICROEL S, 10(4), 2001, pp. 498-502

Authors: Melvas, P Kalvesten, E Stemme, G

Citation: P. Melvas et al., Media protected surface micromachined leverage beam pressure sensor, J MICROM M, 11(6), 2001, pp. 617-622