Authors: Sun, YM Yan, XM Mettlach, N Endle, JP Kirsch, PD Ekerdt, JG Madhukar, S Hance, RL White, JM

Citation: Ym. Sun et al., Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium, J VAC SCI A, 18(1), 2000, pp. 10-16