Authors:
Meyer, LC
Lee, JW
Johnson, D
Huang, M
Ren, F
Anderson, TJ
LaRoche, JR
Lothian, JR
Abernathy, CR
Pearton, SJ
Citation: Lc. Meyer et al., Study of NH3 plasma damage on GaAs Schottky diode in inductively coupled plasma system, J ELCHEM SO, 146(7), 1999, pp. 2717-2719