Authors:
Shanware, A
Massoud, HZ
Acker, A
Li, VZQ
Mirabedini, MR
Henson, K
Hauser, JR
Wortman, JJ
Citation: A. Shanware et al., The effects of Ge content in poly-Si1-xGex gate material on the tunneling barrier in PMOS devices, MICROEL ENG, 48(1-4), 1999, pp. 39-42
Authors:
Li, VZQ
Mirabedini, MR
Vogel, E
Henson, K
Batchelor, D
Wortman, JJ
Kuehn, RT
Citation: Vzq. Li et al., Effects of Si source gases (SiH4 and Si2H6) on polycrystalline-Si1-xGex deposited on oxide by RTCVD, EL SOLID ST, 1(3), 1998, pp. 153-155