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Results:
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Results: 1
Diagnostic of surface wave plasma for oxide etching in comparison with inductive RF plasma
Authors:
Kokura, H Yoneda, S Nakamura, K Mitsuhira, N Nakamura, M Sugai, H
Citation:
H. Kokura et al., Diagnostic of surface wave plasma for oxide etching in comparison with inductive RF plasma, JPN J A P 1, 38(9A), 1999, pp. 5256-5261
Risultati:
1-1
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