Authors:
Miyano, R
Saito, T
Kimura, K
IKeda, M
Takikawa, H
Sakakibara, T
Citation: R. Miyano et al., Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases, THIN SOL FI, 390(1-2), 2001, pp. 192-196
Authors:
Takikawa, H
Kimura, K
Miyano, R
Sakakibara, T
Bendavid, A
Martin, PJ
Matsumuro, A
Tsutsumi, K
Citation: H. Takikawa et al., Effect of substrate bias on AlN thin film preparation in shielded reactivevacuum are deposition, THIN SOL FI, 386(2), 2001, pp. 276-280
Authors:
Takikawa, H
Yatsuki, M
Miyano, R
Nagayama, M
Sakakibara, T
Itoh, S
Ando, Y
Citation: H. Takikawa et al., Amorphous carbon fibrilliform nanomaterials prepared by chemical vapor deposition, JPN J A P 1, 39(9A), 2000, pp. 5177-5179
Authors:
Miyano, R
Kimura, K
Izumi, K
Takikawa, H
Sakakibara, T
Citation: R. Miyano et al., Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition, VACUUM, 59(1), 2000, pp. 159-167