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Results: 2

Authors: Marsh, CD Moiseiwitsch, NE Booker, GR Ashburn, P
Citation: Cd. Marsh et al., Behavior and effects of fluorine in annealed n(+) polycrystalline silicon layers on silicon wafers, J APPL PHYS, 87(10), 2000, pp. 7567-7578

Authors: Moiseiwitsch, NE Ashburn, P Marsh, CD Booker, GR
Citation: Ne. Moiseiwitsch et al., Assessment of a methanol-last interface treatment for use in polysilicon emitter bipolar transistor fabrication, EL SOLID ST, 1(2), 1998, pp. 91-93
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