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Results:
1-3
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Results: 3
Authors:
Kutchoukov, VG
Mollinger, JR
Shikida, M
Bossche, A
Citation: Vg. Kutchoukov et al., Patterning of polyimide and metal in deep trenches, SENS ACTU-A, 92(1-3), 2001, pp. 208-213
Authors:
Kazinczi, R
Mollinger, JR
Bossche, A
Citation: R. Kazinczi et al., Versatile tool for characterising long-term stability and reliability of micromechanical structures, SENS ACTU-A, 85(1-3), 2000, pp. 84-89
Authors:
Kutchoukov, VG
Mollinger, JR
Bossche, A
Citation: Vg. Kutchoukov et al., New photoresist coating method for 3-D structured wafers, SENS ACTU-A, 85(1-3), 2000, pp. 377-383
Risultati:
1-3
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