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Authors:
Suemitsu, T
Nishio, K
Igashira, K
Motojima, S
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Citation: T. Suemitsu et al., Preparation of silicon carbide films by chemical vapor deposition using SiCl4-CH4-H-2 gases, J JPN METAL, 63(7), 1999, pp. 882-887
Citation: Xq. Chen et S. Motojima, The growth patterns and morphologies of carbon micro-coils produced by chemical vapor deposition, CARBON, 37(11), 1999, pp. 1817-1823