Authors:
Liu, YC
Ho, LT
Bai, YB
Li, TJ
Furakawa, K
Gao, DW
Nakashima, H
Muroaka, K
Citation: Yc. Liu et al., Growth of ultrathin SiO2 on Si by surface irradiation with an O-2+Ar electron cyclotron resonance microwave plasma at low temperatures, J APPL PHYS, 85(3), 1999, pp. 1911-1915
