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Results:
1-11
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Results: 11
Authors:
BUCHHOLD R
NAKLADAL A
BUTTNER U
GERLACH G
Citation: R. Buchhold et al., THE METROLOGICAL BEHAVIOR OF BIMORPHIC PIEZORESISTIVE HUMIDITY SENSORS, Measurement science & technology, 9(3), 1998, pp. 354-359
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
EICHHORN KJ
MULLER M
Citation: R. Buchhold et al., REDUCTION OF MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED VOLUME EXPANSION OF POLYMER LAYERS, Microsystem technologies, 5(1), 1998, pp. 3-12
Authors:
BUTTNER U
NAKLADAL A
PESCHKA A
GERLACH G
Citation: U. Buttner et al., CALIBRATION AND ERROR COMPENSATION OF PIE ZORESISTIVE PRESSURE SENSORS, TM. Technisches Messen, 65(6), 1998, pp. 236-243
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
EICHHORN KJ
Citation: R. Buchhold et al., MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED INPLANE EXPANSION OF THIN POLYMER-FILMS, Thin solid films, 312(1-2), 1998, pp. 232-239
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
MULLER M
EICHHORN KJ
HEROLD M
GAUGLITZ G
Citation: R. Buchhold et al., A STUDY ON THE MICROPHYSICAL MECHANISMS OF ADSORPTION IN POLYIMIDE LAYERS FOR MICROELECTRONIC APPLICATIONS, Journal of the Electrochemical Society, 145(11), 1998, pp. 4012-4018
Authors:
SAGER K
SCHROTH A
NAKLADAL A
GERLACH G
Citation: K. Sager et al., HUMIDITY-DEPENDENT MECHANICAL-PROPERTIES OF POLYIMIDE FILMS AND THEIRUSE FOR IC-COMPATIBLE HUMIDITY SENSORS, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 330-334
Authors:
GERLACH G
SAGER K
NAKLADAL A
Citation: G. Gerlach et al., HOW ACCURATE ARE MEASUREMENTS WITH PIEZOR ESISTIVE SENSORS, TM. Technisches Messen, 63(11), 1996, pp. 403-412
Authors:
SAGER K
GERLACH G
NAKLADAL A
SCHROTH A
Citation: K. Sager et al., AMBIENT HUMIDITY AND MOISTURE - A DECISIVE FAILURE SOURCE IN PIEZORESISTIVE SENSORS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 171-175
Authors:
NAKLADAL A
SAGER K
Citation: A. Nakladal et K. Sager, INFLUENCE OF HUMIDITY AND MOISTURE ON THE STABILITY OF PIEZORESISTIVESENSORS, TM. Technisches Messen, 60(12), 1993, pp. 482-489
Authors:
NAKLADAL A
SAGER K
Citation: A. Nakladal et K. Sager, INFLUENCE OF HUMIDITY AND MOISTURE ON THE STABILITY OF PIEZORESISTIVESENSORS, TM. Technisches Messen, 60(11), 1993, pp. 429-434
Authors:
NAKLADAL A
SAGER K
Citation: A. Nakladal et K. Sager, INFLUENCE OF HUMIDITY AND MOISTURE ON THE STABILITY OF PIEZORESISTIVESENSORS, TM. Technisches Messen, 60(10), 1993, pp. 383-388
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