Authors: LANDSBERGER LM NASEH S KAHRIZI M PARANJAPE M

Citation: Lm. Landsberger et al., ON HILLOCKS GENERATED DURING ANISOTROPIC ETCHING OF SI IN TMAH, Journal of microelectromechanical systems, 5(2), 1996, pp. 106-116

Authors: NASEH S LANDSBERGER LM PARANJAPE M KAHRIZI A

Citation: S. Naseh et al., EXPERIMENTAL INVESTIGATIONS OF ANISOTROPIC ETCHING OF SI IN TETRAMETHYL AMMONIUM HYDROXIDE, Canadian journal of physics, 74, 1996, pp. 79-84