Authors: OCOLA LE FRYER D NEALEY P DEPABLO J CERRINA F KAMMER S

Citation: Le. Ocola et al., LATENT IMAGE-FORMATION - NANOSCALE TOPOGRAPHY AND CALORIMETRIC MEASUREMENTS IN CHEMICALLY AMPLIFIED RESISTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3974-3979