Authors: NISHIOKA K SUGIYAMA M NEZUKA M SHIMOGAKI Y NAKANO Y TADA K KOMIYAMA H

Citation: K. Nishioka et al., OPTIMIZATION OF ELECTRON-CYCLOTRON-RESONANCE REACTIVE ION-BEAM ETCHING REACTORS FOR DRY-ETCHING OF GAAS WITH CL-2, Journal of the Electrochemical Society, 144(9), 1997, pp. 3191-3197

Authors: SUGIYAMA M YAMAIZUMI T NEZUKA M SHIMOGAKI Y NAKANO Y TADA K KOMIYAMA H

Citation: M. Sugiyama et al., SIMPLE KINETIC-MODEL OF ECR REACTIVE ION-BEAM ETCHING REACTOR FOR THEOPTIMIZATION OF GAAS ETCHING PROCESS, JPN J A P 1, 35(2B), 1996, pp. 1235-1241

Authors: SUGIYAMA M YAMAIZUMI T NEZUKA M SHIMOGAKI Y NANAKO Y TADA K KOMIYAMA H

Citation: M. Sugiyama et al., A SIMPLE KINETIC-MODEL FOR THE OPTIMIZATION OF ELECTRON-CYCLOTRON-RESONANCE REACTIVE ION-BEAM ETCHING PERFORMANCE FOR GAAS, Applied physics letters, 67(7), 1995, pp. 897-899