Authors: NIKPOUR B LANDSBERGER LM HUBBARD TJ KAHRIZI M IFTIMIE A

Citation: B. Nikpour et al., CONCAVE CORNER COMPENSATION BETWEEN VERTICAL (010)-(001)PLANES ANISOTROPICALLY ETCHED IN SI(100), Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 299-307

Authors: PANDY A LANDSBERGER LM NIKPOUR B PARANJAPE M KAHRIZI M

Citation: A. Pandy et al., EXPERIMENTAL INVESTIGATION OF HIGH SI AL SELECTIVITY DURING ANISOTROPIC ETCHING IN TETRA-METHYL AMMONIUM HYDROXIDE/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 868-872