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Citation: Sk. Griffiths et Rh. Nilson, OPTIMUM CONDITIONS FOR COMPOSITES FIBER COATING BY CHEMICAL-VAPOR INFILTRATION, Journal of the Electrochemical Society, 145(4), 1998, pp. 1263-1272
Citation: Sk. Griffiths et Rh. Nilson, DEPOSITION UNIFORMITY, PARTICLE NUCLEATION, AND THE OPTIMUM CONDITIONS FOR CHEMICAL-VAPOR-DEPOSITION IN MULTIWAFER FURNACES, Journal of the Electrochemical Society, 144(4), 1997, pp. 1399-1410