Authors: SCHELLIN R STRECKER M NOTHELFER U SCHUSTER G

Citation: R. Schellin et al., LOW-PRESSURE ACOUSTIC SENSORS FOR AIRBORNE SOUND WITH PIEZORESISTIVE MONOCRYSTALLINE SILICON AND ELECTROCHEMICALLY ETCHED DIAPHRAGMS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 156-160