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Authors: FARROW RC POSTEK MT KEERY WJ JONES SN LOWNEY JR BLAKEY M FETTER LA GRIFFITH JE LIDDLE JA HOPKINS LC HUGGINS HA PEABODY M NOVEMBRE A
Citation: Rc. Farrow et al., APPLICATION OF TRANSMISSION ELECTRON DETECTION TO SCALPEL MASK METROLOGY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2167-2172

Authors: WATSON GP FU D BERGER SD TENNANT D FETTER L NOVEMBRE A BIDDICK C
Citation: Gp. Watson et al., MEASUREMENT OF THE BACKSCATTER COEFFICIENT USING RESIST RESPONSE CURVES FOR 20-100 KEV ELECTRON-BEAM LITHOGRAPHY ON SI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4277-4282
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