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Results: 1
EFFECT OF SUBSTRATE-TEMPERATURE ON THE PROPERTIES OF RUO2 FILMS PREPARED BY RF REACTIVE MAGNETRON SPUTTERING
Authors:
MENG LJ FORTUNATO E NUNOS R DOSSANTOS MP
Citation:
Lj. Meng et al., EFFECT OF SUBSTRATE-TEMPERATURE ON THE PROPERTIES OF RUO2 FILMS PREPARED BY RF REACTIVE MAGNETRON SPUTTERING, Journal of the Korean Physical Society, 32, 1998, pp. 1835-1838
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