Authors: Kim, HW Ju, BS Nam, BY Yoo, WJ Kang, CJ Ahn, TH Moon, JT Lee, MY

Citation: Hw. Kim et al., High temperature platinum etching using Ti mask layer, J VAC SCI A, 17(4), 1999, pp. 2151-2155

Authors: Kim, JH Woo, SI Nam, BY Yoo, WJ

Citation: Jh. Kim et al., Anisotropic etching characteristics of platinum electrode for ferroelectric capacitor, IEEE DEVICE, 46(5), 1999, pp. 984-992